Effect of certain process variables on vapor deposited tungsten

Author:	Hoertel, Frederick W.
Year:	1966
Document Type:	BMRA
Issuing Agency:	U.S. Dept. of the Interior, Bureau of Mines,
SUDOC:	I 28.23:6731
Series:	Report of investigations / United States Department of the Interior, Bureau of Mines ;
Report Number:	6731
Subjects:	Tungsten
	Vapor-plating
Link:	https://hdl.handle.net/2027/mdp.39015078525253